Cypress
Semiconductor
Texas
2001-2008
Semiconductor
Texas
2001-2008
A continuous display
of little wafers on the screen, color coded by not yet processed, being processed, and done with processing made
error recovery a snap.
While the previous cell controller software was of great help in letting us monitor the rs232 communications line to see the sequence of commands used - in the end, the old software was scrapped. It selected recipes and monitored data, but did not easily tell us what we needed to know.
While the previous cell controller software was of great help in letting us monitor the rs232 communications line to see the sequence of commands used - in the end, the old software was scrapped. It selected recipes and monitored data, but did not easily tell us what we needed to know.
Novellus TEOS and Oxide
When there's a power glitch
or a machine malfunction on a single wafer processing tool, what do you do when the list of wafers that were and were not processed is not clear?
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