The interfacing software was the bridge between the low level tool and the upper level MES (manufacturing execution system). Via interfacing software prompting, lots had to be put onto the tool in the order in which they were wanded in. While there were no smart tags available to automatically read lot numbers, the tool did report wafer quantities going through the load lock. These numbers were matched with MES wafer quantities to detect misplaced lots, and head off the possibilitiy of lots getting processed with the wrong recipe.

Before the interfacing software was implemented, the fab lost 1 to 2 lots per quarter due to misprocessing. After implementation - no lots were lost due to misprocessing for the remaining 7 years of the fab.

amat 8330 etcher